Vacuum Load Lock Door

1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating.

Vacuum load lock door.

Mdc vacuum products llc is an iso 9001 2015 certified company. Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. Doors are hinged and fitted with a swingaway hand knob locking mechanism. For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers.

The chambers are equipped with uhv connecting flanges and additional ports for future versatility. Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping. Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers.

All access doors are supplied with viton elastomer seals suitable for high vacuum service. See quick access doors section vacuum range. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. The top port of the load lock chamber mechanism is usually sealed by a viton gasket.

30ºc maximum when attached. Offered in a wide range of uhv flange sizes with or without viewport glass. Enable quick and convenient access into vacuum vessels such as process chambers and load locks. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers.

Precision hinged access doors seal with a fluorocarbon o ring. Bolt kits for quick access doors with clearance holes. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar. Ln 2 cooling or heating samples up to 600 c.

Doors are hinged and fitted with a swingaway hand knob locking mechanism. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. For conversion tables click here.